용도
제품
응용 분야
PR Stripper RPS Series PR & Polymer Removing
(Wet Cleaning)
Buffered Oxide Etchant RBO Series Silicon Oxide Etching
(Wet Cleaning)
Nitride Strip H3PO4 Silicon Nitride Etching
(Wet Cleaning)
SiO2 TEOS IMD Substrate
(Diff, CVD)
Cu Stripper RCS Series Cu Layer Polymer Removing
(Wet Cleaning)
Cu Make Up Solution RCM Series Cu layer Plating
(Thin Film)
Inorganic Chemical HF, HNO3
NH4OH, H2O2
Wafer & Parts Cleaning
(Wet Cleaning)
Vacuum Pump Oil RPO Series Vacuum Pump,
Lubricant Oil