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PR Stripper |
RPS Series |
PR & Polymer Removing (Wet Cleaning) |
Buffered Oxide Etchant |
RBO Series |
Silicon Oxide Etching (Wet Cleaning) |
Nitride Strip |
H3PO4 |
Silicon Nitride Etching (Wet Cleaning) |
SiO2 |
TEOS |
IMD Substrate (Diff, CVD) |
Cu Stripper |
RCS Series |
Cu Layer Polymer Removing (Wet Cleaning) |
Cu Make Up Solution |
RCM Series |
Cu layer Plating (Thin Film) |
Inorganic Chemical |
HF, HNO3 NH4OH, H2O2 |
Wafer & Parts Cleaning (Wet Cleaning) |
Vacuum Pump Oil |
RPO Series |
Vacuum Pump, Lubricant Oil |