|
용도 |
제품 |
응용 분야 |
| PR Stripper |
RPS Series |
PR & Polymer Removing
(Wet Cleaning) |
| Buffered Oxide Etchant |
RBO Series |
Silicon Oxide Etching
(Wet Cleaning) |
| Nitride Strip |
H3PO4 |
Silicon Nitride Etching
(Wet Cleaning) |
| SiO2 |
TEOS |
IMD Substrate
(Diff, CVD) |
| Cu Stripper |
RCS Series |
Cu Layer Polymer Removing
(Wet Cleaning) |
| Cu Make Up Solution |
RCM Series |
Cu layer Plating
(Thin Film) |
| Inorganic Chemical |
HF, HNO3
NH4OH, H2O2 |
Wafer & Parts Cleaning
(Wet Cleaning) |
| Vacuum Pump Oil |
RPO Series |
Vacuum Pump,
Lubricant Oil
|
